Near field optical head having flexible structure

ABSTRACT

An optical information device has a suspension arm, a moving mechanism for movably supporting the suspension arm relative to a recording medium, an optical head supported by the suspension arm proximate the recording medium and having a slider and a flexible structure for linking the slider to the suspension arm so that the slider undergoes relative sliding movement with respect to the recording medium for at least one of recording information to the recording medium and reading information from the recording medium, and an optical waveguide for guiding light between the suspension arm and the slider. The optical waveguide is integrally formed with the flexible structure and preferably comprises patterned films formed on the optical head.

FIELD OF THE INVENTION

The present invention relates to an optical head for a recordingapparatus used for recording and reproducing (writing and reading)information (data) at a high density by detecting an interaction betweenlight and a very small area of a surface of a record medium by utilizinglight, and more particularly, to a near-field light informationrecording apparatus for observing structural information or opticalinformation at a very small area equal to or smaller than a wavelengthof incident light for use in information recording and reproduction at ahigh density.

BACKGROUND OF THE INVENTION

In recent years, the development of an apparatus for recording andreproducing information at a high density utilizing light, such as anoptical disc, has been intensely pursued. For high density information:storage, it is necessary to shorten a wavelength of light by utilizingultraviolet light or the like; however, there is a limit to suchreduction. Therefore, there is a method for effectively reducing thewavelength of light using an objective solid immersion lens. Anothermethod of effectively shortening a wavelength utilizes near-field lightfor constituting a component of a wave number by an imaginary number.

A high resolution probe utilizing near-field light is used in anear-field optical microscope or a near-field optical head. Bygenerating near-field light from a front end of a probe and detectingpropagated light generated as a result of an interaction between thenear-field light and a sample of a microscope or a recording medium, aspatial resolution exceeding the diffraction limit of light is obtained.There is also a method of detecting near-field light generated as aresult of an interaction between incident propagated light and a sampleor a record medium by a probe. A near-field light microscope achieves aresolution exceeding the diffraction limit of a conventional opticalmicroscope by use of this principle. Further, when such a near-fieldoptical probe is utilized in a near-field optical head, there can beachieved a data recording density exceeding that of a conventionaloptical disk.

According to a data storage apparatus using a near-field light head, thebasic constitution is the same as that of a conventional magnetic diskapparatus a near-field light probe is used in place of a magnetic head.By such structure, the near-field light probe maintains a constantposture in operation relative to a surface of record medium by aflexible structure. When a length direction of a suspension arm isdefined as z-axis, a direction orthogonal to the z-axis and in parallelwith the record medium and a vertical direction are defined as x-axisand y-axis respectively, a typical flexible structure is referred to asflexure structure having a slider that is connected to a frame-likestructure only in the x-axis direction on an inner side of theframe-like structure connected to the suspension arm only in the z-axisdirection. By such a structure, the frame-like structure is providedwith a rotational degree of freedom with respect to the z-axis and theslider is provided with a degree of freedom with the x-axis as arotating axis relative to the frame-like structure. That is, the slideris provided with rotational degrees of freedom with z-axis and x-axis asaxes thereof relative to the suspension arm.

In making light incident on the slider relative to the suspension armconstituted in this way, an optical fiber or a waveguide is connected tothe slider or light is irradiated to an upper face or a side face of theslider.

However, when light is made incident on the slider by theabove-described structure, connection of some member, such as thewaveguide, to the slider hinders free movement of the slider, it isdifficult to maintain the posture of the slider and a distance between asurface of the record medium and a very small aperture cannot bemaintained constant. When the distance between the surface of the recordmedium and the very small aperture is not constant, optical intensityrelated to the interaction is not made constant and a stable outputsignal cannot be provided. In order to carry out high-speedrecording/reproduction, it is necessary to reduce noise. However, noisereduction becomes difficult when the signal is not stabilized. Further,when light is made incident on the slider by aerial propagation, it isextremely difficult to move incident light in synchronism with themovement of the slider. When light is made incident on an upper face ofthe slider by the aerial propagation, it is necessary to arrangestructure for light reflection above the slider and this poses a problemin that the entire apparatus becomes large-sized.

SUMMARY OF THE INVENTION

In order to resolve the above-described problems, according to a firstaspect of the invention, there is provided an optical head comprising aslider supported by a suspension arm providing a load weight, providedwith air bearing force by a movement thereof relative to a record mediumand producing a clearance between the record medium and the slider by abalance between the load weight and the air bearing force, a flexiblestructure by which the slider can change a posture thereof relative tothe suspension arm, an arm-to-slider light guiding structure forprojecting light from the suspension arm to a surface of the slider, anaperture formed at a bottom face of the slider for interacting with therecord medium via light, and an in-slider light guiding structure forprojecting light from the surface of the slider to the aperture, whereininformation is recorded and reproduced by the interaction between therecord medium and the aperture via the light when the slider scans thesurface of the record medium, and wherein the flexible structure isintegrated with the arm-to-slider light guiding structure.

According to the first aspect of the invention, when the slider scansthe surface of the record medium, the slider and the suspension arm areconnected and light is conveyed from one to the other with high andstabilized efficiency while maintaining the posture of the sliderconstant relative to the surface of the record medium. Thereby, a stableoutput signal is provided and high-speed recording/reproduction can becarried out. Further, in comparison with related art in which theflexible structure and the arm to slider light guiding structure areseparated from each other, downsizing of the entire apparatus isrealized.

Further, according to a second aspect of the invention, there isprovided an optical head according to the first aspect, wherein theflexible structure is fabricated with an optical waveguide formedthereon.

According to the second aspect of the invention, in addition to aneffect realized by the first aspect of the invention, the flexiblestructure is fabricated from a single substrate and accordingly,fabrication steps can be simplified and the optical head can befabricated at a low cost.

Further, according to a third aspect of the invention, there is providedthe optical head according to the first aspect, wherein the flexiblestructure is fabricated by adhering or forming the light guidingstructure to the surface or the inner portion of the flexible structure.

According to the third aspect of the invention, in addition to theeffect realized by the first aspect of the invention, the flexiblestructure and the light guiding structure can be fabricated by existingtechnology and the optical head can be fabricated at a low cost.

Further, according to a fourth aspect of the invention, there isprovided the optical head according to any one of the first through thethird aspect of the optical heads wherein the arm-to-slider lightguiding structure is constituted by a structure having a small lightpropagation loss.

According to the fourth aspect of the invention, in addition to aneffect realized by the first aspect through the third aspect of theoptical heads, light loss in guiding light between the arm and theslider can be minimized.

Further, according to a fifth aspect of the invention, there is providedthe optical head according to any one of the first through the thirdaspect of the optical heads wherein the arm to slider light guidingstructure is formed in a linear line or a shape having a small radius ofcurvature.

According to the fifth aspect of the invention, in addition to theeffect realized by the first aspect through the third aspect of theoptical heads, light loss in guiding light between the arm and theslider can be minimized.

Further, according to a sixth aspect of the invention, there is providedthe optical head according to any one of the first aspect through thefifth aspect of the optical heads wherein the aperture is as small as asize equal to or smaller than a wavelength of light and the lightinteracting with the record medium is near-field light.

According to the sixth aspect of the invention, in addition to theeffect realized by the first aspect through the fifth aspect of theoptical heads, by utilizing super resolution that is a characteristic ofthe near-field light, a record density exceeding the diffraction limitof light is realized. Further, with regard to each of effects realizedby the first aspect through the fifth aspect of the optical heads,regardless of distance dependency of optical intensity which is acharacteristic of the near-field light, a stable signal output isprovided and high speed recording/reproduction can be carried out.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a view showing the outline of an optical data storageapparatus according to Embodiment 1 of the invention.

FIG. 2 is a view showing a flexure structure f or an optical headaccording to Embodiment 1 of the invention.

FIG. 3 is an enlarged view showing the flexure for an optical headaccording to Embodiment 1 of the invention.

FIG. 4 is a total View showing a suspension arm integrated with aflexure for an optical head according to Embodiment 2 of the invention.

FIGS. 5A, 5B, 5C and 5D are views showing a method of fabricating asuspension arm integrated with the flexure for an optical head accordingto Embodiment 2 of the invention.

FIG. 6 is a total view showing a suspension arm integrated with aflexure for an optical head according to Embodiment 3 of the invention.

FIG. 7 is an upper view showing a flexure for a near-field light headaccording to Embodiment 4 of the invention.

FIG. 8 is a sectional view of the near-field light head and a front endportion of the flexure according to Embodiment 4 of the invention.

FIG. 9 is an upper view showing a flexure for other near-field lighthead according to Embodiment 4 of the invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

(Embodiment 1)

FIG. 1 shows an outline of an optical data storage apparatus accordingto Embodiment 1 of the invention. The basic constitution is similar tothat of a magnetic disk apparatus of related art. That is, a flexure 3is formed at a front end portion of a suspension arm 2 and a motor (notillustrated) rotates at high speed a recording medium 4. A near-fieldlight aperture (not illustrated) is brought in close proximity to thesurface of the recording medium 4, such as several tens of nanometersand the near-field light aperture is floated at a constant distancerelative to the recording medium 4. The suspension arm 2 is movable inthe radius direction of the record medium 4 by a voice coil motor 5.Light is guided to a vicinity of the flexure 3 by an optical waveguideor an optical fiber adhered to or formed on the suspension arm 2.

Scattered light generated as a result of an interaction by thenear-field with the record medium, is received by, for example, a lightreceiving element (not illustrated) adhered onto the flexure, convertedinto an electric signal and transmitted to a signal processing circuit(not illustrated). The signal is amplified by an amplifying circuit asnecessary to thereby constitute a reproduced signal of information.Although according to the embodiment, there is carried out anillumination mode for generating the near-field light from a very smallaperture and scattering thereof by the record medium, the presentinvention can similarly be embodied also by a collection mode forgenerating the near-field light at a surface of the record medium andfocusing light scattered by the very small aperture.

FIG. 2 shows a flexure structure for a near-field light head accordingto Embodiment 1 of the invention. There is a second or inner frame 8made of stainless steel connected to a first or outer frame 7 made ofstainless steel by rolling support shafts 9 which allow relative rollingmovement of the inner frame 8 with respect to the outer frame 7. Aslider 11 is connected to the frame 8 by pitching support shafts 10which allow relatively pitching movement of the slider 11. By thisstructure, the slider 11 is provided with various degrees of freedom ofrotation around the z-axis and x-axis. There is realized a function offollowing out-of-phase vibration of the record medium rotating at highspeed.

FIG. 3 shows an enlarged view of the flexure for the near-field lighthead according to Embodiment 1 of the invention. An optical waveguide 12is adhered to a surface of a supporter for connecting the suspension armand the slider. The optical waveguide 12 is a waveguide on a siliconsubstrate fabricated by a semiconductor process and is adhered onto theflexure. At this occasion, the light waveguide 12 is adhered thereto bymaking optical axes of a light incident port (not illustrated) of theslider and the optical waveguide 12 coincide with each other. There isno significant change in shape or weight of the flexure and accordingly,there is no adverse influence in the degrees of freedom provided to theabove-described slider.

Thereby, the posture of the slider relative to the surface of the recordmedium can be maintained constant, further, since the waveguide isdirectly connected thereto, there is realized incidence of light to theslider at a constant efficiency. Since the interaction by the near-fieldlight is utilized, there is realized recording/reproduction at a recorddensity exceeding the diffraction limit of light. The near-field lightgenerated from the very small aperture is attenuated strongly dependentupon a distance from the very small aperture, however, according to theembodiment, the slider follows the movement of the record medium by theflexure structure and accordingly, stable interaction is always producedand there is provided a signal output which is always stabilized duringrecording/reproduction of information. Further, small-sized formation ofthe entire apparatus can be realized since the flexure and the lightguiding structure are integrated. Such a flexure is easy to fabricateand can be mass-produced at a low cost.

(Embodiment 2)

FIG. 4 shows a total view of a suspension arm integrated with a flexurefor a near-field light head according to Embodiment 2 of the invention.The total is constructed by a structure of one sheet of flat plate of asilicon substrate 21. A waveguide 19 is formed at an upper face of thesilicon substrate 21 and is formed from a side (right end of thedrawing) of a rotating shaft (not illustrated) of a suspension arm to aslider 18 in the flexure. It is not necessary that the light guidingstructure is limited to the constitution with silicon for the substratebut there may be constructed a light guiding structure fabricated on asupporter formed of plastic materials. Light propagated to the slider 18is guided to the very small aperture by changing a propagating directionthereof by, for example, forming a light reflecting film at an upperface of the slider. The light is converted into near-field light by thevery small aperture formed in the slider and interacts with the recordmedium. An operational mechanism thereafter is the same as thatexplained in Embodiment 1 and accordingly, an explanation thereof willbe omitted.

FIGS. 5A through 5D show a method of fabricating a suspension armintegrated with the flexure for a near-field light head according toEmbodiment 2. In respective drawings of FIGS. 5A through FIG. 5D, topviews are shown on the upper side and sectional views taken along a linesegment AB indicated in the FIG. 5A are shown on the lower side.Although there is used the silicon substrate 21 having a thickness ofabout 500 through 1000 micrometers, there may be used a substrate havinga different thickness. In FIG. 5A, there is provided a taper structure22 in a shape of an inverse cone at the silicon substrate 21 byanisotropic etching. There is formed a very small aperture 23 having adiameter of about 100 nanometers at a top portion of the inverse cone,that is, a bottom face of the silicon substrate. In FIG. 5B, there areformed recesses 24 patterned at an upper face of the silicon substrateby etching. The portions finally constitute through holes. In FIG. 5C,after vapor-depositing a light shielding film (not illustrated) ofaluminum at the taper portion 22 with a thickness of 100 nanometers, theoptical waveguide 19 having a clad-core-clad structure is patterned andlaminated. A middle view of FIG. 5C is the sectional view taken alongthe line segment AB in an upper view and a lower view is a sectionalview taken along a line segment CD in the upper view. Finally, in FIG.5D, the recesses 24 are removed from a lower face of the siliconsubstrate by etching to thereby finish the suspension arm.

The suspension arm formed by the above-described method is constructedby a structure having the function of a flexure structure provided to asuspension arm of a conventional magnetic disk apparatus integrated witha slider, a near-field light head and a waveguide structure for guidinglight from a light source (not illustrated) to the very small apertureformed at the front end of the head. Thereby, not only can stableincidence of light to the slider be carried out but also the method offabricating the suspension arm is easily facilitated and inexpensive.

(Embodiment 3)

FIG. 6 shows a total view of a suspension arm integrated with a flexurefor a near-field light head according to Embodiment 3. A slider 34undergoes rolling by means of a rolling support shaft 33 and pitching bymeans of pitching support shafts 31. The slider 34 is formed with ataper at a front end of which a very small aperture 32 is formed. Anoptical waveguide 36 may be formed integrally with the suspension arm asin Embodiment 2 or may be formed separately from the suspension arm andadhered thereto. The feature of the present embodiment resides in thatby arranging the pitching support shafts 31 to be directed in the lengthdirection of the suspension arm, the slider 34 can be formed to linearlydirect light to the slider 34 without the slider 34 being curved at amidway thereof. The shafts are formed by a shape which is slender in thelength direction of the suspension arm and accordingly, the shafts aredifficult to deform in the rolling direction and are easy to deform inthe pitching direction. Although according to the embodiment, thepitching support shafts 31 are formed in a shape in which three legs ofbeams are connected to the slider, any number of legs of beams may beconnected thereto and there may be formed any shape so far as there isformed a structural member capable of pitching and having some linearshape from the suspension arm to the slider. By a combination of thepitching support shafts 31 and the rolling support shaft 33, the slideris provided with the same degrees of freedom as those of a slider in amagnetic disk of the related art.

Since the optical waveguide 36 is formed linearly, propagation loss at amidway thereof can significantly be restrained. It is apparent from theembodiment that such an effect can be realized by any structure otherthan the structure of the embodiment in which some structural member islinearly connected from a suspension arm to a slider.

Further, even in the case that a near-field light head is fabricated byusing a very small projection for scattering near-field light at asurface of a record medium in place of a very small apertureinteractively operated with a record medium via the near-field light, astructure similar to that in the above-described embodiment can befabricated and it is possible that scattered light is received by alight receiving element arranged at a vicinity of the very smallprojection and the light is thereafter propagated by an opticalwaveguide at inside of a suspension arm having the above-describedstructure and transmitted to a signal processing circuit. Thereby, lightcan be propagated with a stabilized efficiency.

(Embodiment 4)

FIG. 7 shows a top view of a flexure 40 for a near-field light headaccording to Embodiment 4. The flexure 40 is adhered to a suspensionarm, not illustrated, at an adhering portion 41. A movable portion 42 isnot adhered to the suspension arm and accordingly, is provided with somedegrees of freedom. A near-field light head 43 is adhered to acantilever 45 formed at a front end of the flexure 40. The flexure 40comprises Si and a waveguide 46 is fabricated by forming a silicon oxidefilm on Si. Although in this case, the waveguide 46 is fabricated at anupper face of the flexure 40, the waveguide 46 can also be fabricated ata lower face thereof. Light emitted from a front end of the waveguide 46is reflected by a mirror face 44 and is propagated in the direction ofthe near-field light head 43. The mirror face is formed byvapor-depositing a material having high reflectivity such as Al on aninclined face of an Si substrate by anisotropic etching. FIG. 8 is asectional view of the near-field light head 43 and a front end portionof the flexure 40 according to Embodiment 4. The near-field light head43 is formed with air bearing surfaces 51 at a lower face thereof (facedirected to a record medium, not illustrated) and a very small aperture53 surrounded by a light shielding film 52. The air bearing surfaces 51receive air bearing force produced by rotational movement of the recordmedium from a lower direction of the drawing, thereby, the near-fieldlight head 43 and the movable portion 42 of the flexure 40 are moved andthe near-field light head 43 maintains always at the same posturerelative to the surface of the record medium. Light is emitted from thewaveguide 46, reflected by the mirror face 44 and is propagated to thevery small aperture 53 with stabilized high efficiency.

According to the embodiment, the waveguide 46 is formed at a positionshifted from center of the flexure 40 to the right side of the drawingin order to make the very small aperture 53 as proximate to the recordmedium as possible. This corresponds to the fact that the right side ofthe drawing is floated up in the posture proximate to the surface of therecord medium more than the left side since the air bearing force by airreceived by the near-field light head 43 is operated from the leftdirection of the drawing. Meanwhile, as other embodiment, as shown byFIG. 9, it is possible to construct a structure in which the waveguide46 is formed at the center of the flexure 40 and light is curved by themirror face 44 on the cantilever 45. This is basically the same as thestructure which is embodied in Embodiment 3.

As explained above, according to the first aspect of the invention,there is provided an optical head comprising a slider supported by asuspension arm providing a load weight, provided with an air bearingforce generated by movement thereof relative to a record medium andproducing a clearance between the record medium and the slider by abalance between the load weight and the air bearing force, a flexiblestructure by which the slider can change a posture thereof relative tothe suspension arm, an arm-to-slider light guiding structure forprojecting light from the suspension arm to a surface of the slider, anaperture formed at a bottom face of the slider for interacting with therecord medium via light, and an in-slider light guiding structureconnecting the surface of the slider and the aperture by light, whereininformation is recorded and reproduced by the interaction between therecord medium and the aperture via the light when the slider scans asurface of the record medium, and wherein the flexible structure isintegrated with the arm-to-slider light guiding structure. Therefore,there is achieved the effect of realizing that when the slider scans thesurface of the record medium, while maintaining constant the posture ofthe slider relative to the surface of the record medium, the slider andthe suspension arm can be connected with a high and stable efficiency bylight. Further, there is achieved an effect of realizing that a stableoutput signal is provided, high speed recording/reproduction can becarried out and in comparison with related art in which the flexiblestructure and the arm-to-slider light guiding structure are separatedfrom each other, a total of the apparatus is downsized.

Further, according to the second aspect of the invention, there isprovided the optical head according to the first aspect of the opticalhead wherein the flexible structure is fabricated by an opticalwaveguide. Therefore, there is achieved the effect that in addition tothe effect realized by the first aspect of the optical head, theflexible structure is fabricated from a single substrate andaccordingly, fabricating steps are simplified and the optical head canbe fabricated at a low cost. Further, according to the third aspect ofthe invention, there is provided the optical head according to the firstaspect of the optical head wherein the flexible structure is fabricatedby adhering or forming the light guiding structure to a surface or aninner portion of the flexible structure. Therefore, there is achievedthe effect that in addition to the effect realized by the first aspectof the optical head, the flexible structure and the light guidingstructure can be fabricated by related art and the optical head can befabricated at a low cost.

Further, according to the fourth aspect of the invention, there isprovided the optical head according to any one of the first aspectthrough the third aspect of the optical heads wherein the arm-to-sliderlight guiding structure is constituted by a structure having a smalllight propagation loss. Therefore, there is achieved the effect that inaddition to the effect realized by the first aspect through the thirdaspect of the optical heads, light loss in guiding light between the armand the slider can be minimized.

Further, according to the fifth aspect of the invention, there isprovided the optical head according to any one of the first aspectthrough the third aspect of the optical head wherein the arm-to-sliderlight guiding structure is formed in a linear line or a shape having asmall radius of curvature. Therefore, there is achieved the effect thatin addition to the effect realized by the first aspect through the thirdaspect of the optical heads, light loss in conducting light between thearm and the slider can be minimized.

Further, according to the sixth aspect of the invention, there isprovided the optical head according to any one of the first aspectthrough the fifth aspect of the optical heads wherein the aperture is assmall as a size equal to or smaller than a wavelength of light and thelight interacting with the record medium is near-field light. Therefore,in addition to the effect realized by the first aspect through the fifthaspect of the optical heads, by utilizing ultra resolution which is acharacteristic of the near-field light, a record density exceeding adiffraction limit of light is realized. Further, with regard to each ofthe effects realized by the first aspect through the fifth aspect of theoptical heads, there is achieved the effect that regardless of distancedependency of optical intensity which is a characteristic of thenear-field light, a stable signal output is provided and high speedrecording/reproduction can be carried out.

What is claimed is:
 1. An optical head comprising: a slider supported bya suspension arm such that a load weight is placed on the suspensionarm, the load weight being counterbalanced by an air bearing forcegenerated by movement of the slider relative to a recording medium so asto produce a clearance between the recording medium and the slider; aflexible structure linking the slider to the suspension arm so that aposture of the slider relative to the suspension arm can be changed; anarm-to-slider light guiding structure for guiding light between thesuspension arm and the slider; a minute aperture formed at a bottom faceof the slider for interacting with the recording medium via near-fieldlight; and an in-slider light guiding structure for guiding lightbetween the surface of the slider and the aperture; wherein informationis recorded to and/or read from the recording medium based on thescattering of near-field light between the recording medium and theaperture while the slider is being scanned over the surface of therecording medium; and wherein the flexible structure is integrated withthe arm-to-slider light guiding structure.
 2. An optical head accordingto claim 1; wherein the flexible structure has an optical waveguideformed thereon.
 3. An optical head according to claim 1; wherein thearm-to-slider and in-slider light guiding structures are adhered to theflexible structure.
 4. An optical head according to any one of claims 1through 3; wherein the arm-to-slider light guiding structure has a smalllight propagation loss.
 5. An optical head according to any one ofclaims 1 through 3; wherein the arm-to-slider light guiding structure isformed in a linear line or a shape having a small radius of curvature.6. An optical head according to claim 1; wherein the minute aperture hasa size equal to or smaller than a wavelength of light.
 7. An opticalhead according to claim 1; wherein the slider, the suspension arm andthe flexible structure are formed of a single etched semiconductorsubstrate.
 8. An optical head according to claim 7; wherein the aperturecomprises an inverted conical hole formed in the semiconductorsubstrate.
 9. An optical head according to claim 7; wherein thein-slider light guiding structure comprises a reflective coating formedon a portion of the substrate for reflecting light from the sliderthrough the aperture and onto the recording medium.
 10. An optical headaccording to claim 1; further comprising projections formed on a surfaceof the suspension arm confronting the recording medium to produce theair bearing force in response to relative movement between the recordingmedium and the slider.
 11. An optical head according to claim 1; whereinthe flexible structure comprises an outer frame attached to thesuspension arm and an inner frame attached to the outer frame, and theslider is attached to the inner frame.
 12. An optical head according toclaim 11; further comprising rolling support members for attaching theinner frame to the outer frame to allow relative rolling movement of theinner frame with respect to the outer frame, and pitching supportmembers for attaching the slider to the inner frame to allow relativepitching movement of the slider with respect to the inner frame.
 13. Anoptical head according to claim 1; wherein the recording mediumcomprises an optical disc.
 14. An optical head according to claim 1;wherein the arm-to-slider light guiding structure comprises an opticalwaveguide formed of patterned films formed on the flexible structure.15. An optical information device comprising: a suspension arm; a movingmechanism for movably supporting the suspension arm relative to arecording medium; an optical head supported by the suspension armproximate the recording medium and having a slider provided with aminute aperture and a flexible structure for linking the slider to thesuspension arm so that the slider undergoes relative sliding movementwith respect to the recording medium for at least one of recordinginformation to the recording medium and reading information from therecording medium by producing or scattering near-field light between theminute aperture and the recording medium; and an optical waveguideintegral with the flexible structure for guiding light between thesuspension arm and the minute aperture formed in the slider.
 16. Anoptical head according to claim 15; wherein the optical waveguidecomprises patterned films formed on the optical head.
 17. An opticalinformation device according to claim 15; wherein the moving mechanismcomprises a voice coil motor.
 18. An optical information deviceaccording to claim 15; wherein the recording medium comprises an opticaldisc.
 19. An optical information device according to claim 15; whereinthe flexible structure comprises an outer frame attached to thesuspension arm, and an inner frame attached to the outer frame, theslider being attached to the inner frame.
 20. An optical informationdevice according to claim 19; further comprising rolling support membersfor attaching the inner frame to the outer frame to allow relativerolling movement of the inner frame with respect to the outer frame, andpitching support members for attaching the slider to the inner frame toallow relative pitching movement of the slider with respect to the innerframe.
 21. An optical information device according to claim 15; whereinthe optical head is supported by the suspension arm such that a loadweight is placed on the suspension arm by the optical head and the loadweight is counterbalanced by an air bearing force generated by relativemovement of the optical head with respect to the recording medium so asto produce a gap between the recording medium and the optical head. 22.An optical information device according to claim 15; wherein the slider,the suspension arm and the flexible structure are formed of a singleetched semiconductor substrate.
 23. An optical information deviceaccording to claim 22; further comprising an aperture comprised of aninverted conical hole formed in the semiconductor substrate.